Manufacturer: Allwin21
Condition: New
Wafer Size: 2″ – 6″ Capability
Wafer Loading: Manual
Metal Thickness Range: 100Å – 270kÅ
Metal Sheet Resistance Range: 1mΩ/square – 19,990Ω/square capability
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AWgage-150 measures sheet resistance in ohms per square
or milliohms per square. If specific resistivity is known, the thickness of the
deposited film layer can be computed from the sheet resistance. The choice of
measurement data is easily get in the software. AWgage-150 can accommodate
150mm (6") wafers as well as the standard 2",
3",4", 5" wafers without any hardware change
Non-contact Sheet Resistance Measurement.
100Å to 270kÅ Metal Film
Thickness range.
Touch Screen Monitor GUI and PC w/ Advanced Allwin21
software.
Wafer carriage travel programmed with internal
encoder step motor , without encoder disk.
Consistent wafer-to-wafer process cycle
repeatability.
Small footprint and energy efficient.
Made in U.S.A.
The
AWgage-150 system is controlled by menu commands from the control software.
This software allows a great deal of flexibility and control of the Allwin21
system. The AWgage-150 control software
features the following:
Automated
calibration of all subsystems from within the control software. This allows
faster and easier calibration, leading to enhanced process results. The
AWgage-150 allows calibration of the ohm and milliohm measurements within the
software for maximum performance and accuracy. This provides a much easier and
faster method to calibrate the instrument than by adjusting pots on the back of
the traditional Sheet Resistance Measurement Instrument.
The
SOFTWARE can compensate for where the flat is on the carriage to locate the
test points.
It
features a recipe editor to create and edit recipes to fully automate the
processing of wafers on the Allwin21 system.
Validation
of the recipe so improper points will be revealed.
Storage
of multiple recipes, process data and calibration files so that process and
calibration results can be maintained and compared over time.
Passwords
provide security for the system, recipe editing, diagnostics, calibration and setup
functions.
Simple
and easy to use menu screens which allow an automatic cycle to be easily
defined and executed.
Troubleshooting
features which allow engineers and service personnel to activate individual
subassemblies and functions.
Perform odd number of site tests: 1 to 9 points
Highly
Conductive or Metal Sheet Resistance:1 to 1,999 mW/square, or 1 to 1,999 W/square, or
10 to 19,990 W/square
Highly
Conductive or Metal Film Thickness: Minimum: 100 Ångström; Maximum:
Proportional to resistivity. Maximum for a resistivity of 2.7 mW-cm is 270 k Å (27 mm)
Sheet
Resistance Repeatability:Total repeatability is the standard deviation (s) percent of mean value(X%),1 count.1 to 100 mW/sq; W/sq 1%;100 to 500
mW/sq; W/sq 2%; 500 to 1000 mW/sq; W/sq
4%; 1000 to 1,999 mW/sq; W/sq 6%’ 1,999 to 5,000 W/sq/ 5000 to 10,000 W/sq /
10,000 to 15,000 W/sq Consult Factory
Main Frame
Wafer Carriage (2”-6”)
Measurement Head
RF Tank Circuit board
Pentium® class computer board
Main control board
Motor control board.
Two USB Ports
Two Extra DB9 Ports
15–inch touch screen GUI
Allwin21 Corp proprietary software package.
Mouse & keyboard .
USB Flash Drive with AW Software backup.
CE Certification (Optional)
Turn
on the power to the AWgage-150. Allow 30 minutes for warming up.
Select
an existing recipe or create a new recipe.
When
The carriage is in the loading position, place the wafer on the carriage
between the four locator blocks. The wafer will be centered over the circular
platform that rotates the wafer.
Manual
Mode: Press the MAN/AUTO button, so the LED is off. Momentarily press the
START/STANDBY button. The carriage will move the wafer under the measurement
head to the first point in the measurement sequence. For multi-point
measurements--press START/STANDBY once for each point in the measurement
sequence. The wafer will be advanced to the next point. When the measurement
sequence is complete the carriage will move to the right until the wafer is out
from under the measurement head in the loading/unloading position. The wafer
can be removed from the carriage after it has reached this position.
Automatic
Mode: Press the MAN/AUTO button on the AWgage-150 control panel until the LED
comes on. Press the START/STANDBY button. The entire measurement sequence will
be performed without further operator intervention. When the sequence is
complete, the wafer will be moved to the unloading position.
PC
Screen Mode: Press the “Start Test” button at the Process Screens (for Engineer
or Production) to test the wafer that is on the wafer carriage, using the
selected recipe. The entire measurement sequence will be performed without
further operator intervention. When the sequence is complete, the wafer will be
moved to the unloading position.
All
data measurements are recorded in the computer for later retrieval, inspection
and, if desired, a print-out of the measured points can be printed on an
external printer.
Instrument needs to be on a
hard/solid surface.
The room temperature should
be close to 23° C for the greatest measurement accuracy.
Avoid environments with high
concentrations of particulates, especially abrasives such as glass and silicon
dust.
Power : 50/60Hz, Single
Phase, 110/220VAC, 2 Amps
Weight and Dimensions: 44
LBs ; 11 inch (W) X 18 inch (D) X 22 inch (H)
Keywords:Mgage
200, Mgage 300, M-gage 200, M-gage 300,Sheet Resistant measurement, Metrology, Tencor M-Gage 300,Tencor M-Gage 200, sheet resistance, sheet resistance
Measurement, Semiconductor Equipment, Semiconductor metrology Equipment,
KLA-Tencor, Tencor
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